SPACEA Bearings for Vacuum Environments

Part of NSK’s SPACEA™ Series of bearings for special environments, NSK’s bearings for vacuum environments utilize a special self-lubricating MoS2-based material to extend operating life by as much as ten times over conventional bearings.

NSK’s vacuum bearings are best suited for semiconductor manufacturing equipment and robots operating in vacuum environments.

 

  • Self-lubricating cage type features:
    • MoS2-based Low Friction, Low-Wear Self-lubricating cage material.
      • Low frictional coefficient and the highest wear resistance
      • Material readily rubs off and adheres to parts in sliding contact
      • Low outgassing volume and no emissions of high polymer gas
      • High heat resistance
    • Long Life
      • At least ten times longer life than conventional bearings for vacuum environments
    • Low Outgassing

 

  • Spacer joint type features:
    • Long life in temperatures as high as 350ºC
    • Excellent friction and wear characteristics are realized with allow-based self-lubricating spacer joint material.

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